Nanometer patterning with ice
From Soft-Matter
Written by: Grant England AP225 Fall, 2011
Info
Title: Nanometer Patterning with Ice
Authors: King, Gavin M., Gregor Schurmann, Daniel Branton, and Jene A. Golovchenko
@Harvard: http://dash.harvard.edu/bitstream/handle/1/3109370/Branton_NanometerPatterning.pdf?sequence=1
Summary
This paper detailed the use of water ice as a photolithographic material akin to photoresist. By growing layers of ice on a substrate, and using e-beam or FIB to sublimate parts of the ice off, the authors were able to achieve very high (though not record-breaking) resolution for metal features deposited on the substrate.
