Low-temperature synthesis of nanoscale silica multilayers – atomic layer deposition in a test tube

Birgit Hausmann

Reference

B. Hatton et. al. "Low-temperature synthesis of nanoscale silica multilayers – atomic layer deposition in a test tube”, J. Mater. Chem., (20) 6009–6013 2010

Keywords

Atomic layer deposition, silica multilayer

Overview

Tetramethoxysilane vapor is used alternately with ammonia vapor as a catalyst to grow uniform silica multilayers onto hydrophilic surfaces at ambient conditions.

Results and Discussion